Particle-IoT – Equipment Chamber Particle Monitoring System

  • Prevent Excessive Particle Contamination from Compromising Process Yield
  • Main Advantages

    1. Real-Time Monitoring

    2. Dual-Threshold Settings

    3. Trend Analysis

    4. Real-Time Alerts
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  • E-mail : Superplus@superplus.com.tw
  • Business Hours : Mon-Fri 09:00〜18:00
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