FOUP In-Transit Vibration Monitoring & Analysis System In-Transit Rail Vibration Monitoring & Analysis

  • Protecting Highly Sensitive Assets Designed in a FOUP form factor, the Rail Vibration Monitoring and Analysis System captures comprehensive vibration data and video footage throughout the transport process. It helps customers identify yield-risk hotspots along the track, ensuring that every wafer is transported smoothly and securely in a stable environment.
  • Main Advantages

    1. Seamless OHT Integration

    2. All-in-One Multifunctional Integration

    3. Vibration Data Analysis

    4. On-Site Video Recording
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  • E-mail : Superplus@superplus.com.tw
  • Business Hours : Mon-Fri 09:00〜18:00
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