|AMHS晶圓保護解決方案
- 設備代理項目
-
全自動晶圓篩選與搬送系統
Automated Wafer Transfer System
(Wafer / Panel Sorter & EFEM -
全自動晶圓儲存裝置
Auto Bare Wafer & frame Stocker (3200 / 6400 Storage) -
FOUP形式軌道振動檢測分析器
FOUP In-Transit Vibration Monitoring & Analysis System In-Transit Rail Vibration Monitoring & Analysis -
Particle-loT-設備內腔微粒子偵測系統
Particle-IoT – Equipment Chamber Particle Monitoring System -
VMS-SE 地震感測分析系統
VMS-SE –Seismic Monitoring & Analysis System
